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450 mm R/Theta/Z Stage PDF Print E-mail
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450 mm R/Theta/Z Stage
Integrated Laser Prealigner
450mm Wafer on Low Contact Chuck 1
450mm Wafer on Low Contact Chuck 2
Theta/Z Axis with 450mm wafer side view
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450mm Stage Side View

 

Our NEW 450mm R/Theta/Z Stage made it's debut at Semicon West 2009.


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