3300 Series 300mm R/Theta/Z stage

3300 Front View

Front view showing the Integrated Laser Prealigner.

3300 Top View

Top view showing the Dual Buffer Station.

3300 Top View with Wafer

Top view showing 300mm wafer on the Top Buffer Station

3300 in Operation

The 3300 R/Theta/Z in operation.

3300 Prealigning a Wafer

The 3300 Series stage during a pre-align routine.

Rear Internal View

All facilities (power, vacuum, and communications) come in through one port on the bottom of the stage.