4300 Series 300 MM X/Y/Z Theta stage.
4300 with a 300 MM wafer during a pre-align routine.
4300 stage in operation. Here, there are two 300 MM wafers, one in the upper buffer station,
and the second has just been pre-aligned and ready to be “handed off”.
The 4300 series can also handle multiple wafer sizes.
All 4 axis controllers are mounted on a single backplane for reliability.